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epitaxial reactor [1 record]

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Record 1 2001-09-05

English

Subject field(s)
  • Semiconductors (Electronics)
  • Printed Circuits and Microelectronics
  • Industrial Techniques and Processes
DEF

A chamber or device used to form an epitaxial film on a substrate.

OBS

There are three types of systems used to produce epitaxia l films: (a) Chemical vapour deposition (CVD)l (b) Liquid, and (c) Molecular beam.

French

Domaine(s)
  • Semi-conducteurs (Électronique)
  • Circuits imprimés et micro-électronique
  • Techniques industrielles

Spanish

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