TERMIUM Plus®

The Government of Canada’s terminology and linguistic data bank.

ion beam lithography [1 record]

Filter results by subject field Alphabetical list of terms

Filter results by subject field

Alphabetical list of terms

Record 1 2001-05-15

English

Subject field(s)
  • Printed Circuits and Microelectronics
  • Industrial Techniques and Processes
OBS

Ion-beams are used to produce fineline lithography patterns in semiconductor processing operations or as etchers in ion-milling stages.

French

Domaine(s)
  • Circuits imprimés et micro-électronique
  • Techniques industrielles
CONT

Les procédés clés qu'emploie le Groupe de microfabrication comprennent la lithographie (optique, par faisceau électronique et par faisceau ionique), la gravure par faisceau ionique et attaque chimique.

Spanish

Save record 1

Copyright notice for the TERMIUM Plus® data bank

© Public Services and Procurement Canada, 2024
TERMIUM Plus®, the Government of Canada's terminology and linguistic data bank
A product of the Translation Bureau

Display options

Change the order of display of the official languages of Canada
Option to display the non-official languages (Spanish or Portuguese)
Display definitions, contexts, etc., on records

Features

Language Portal of Canada

Access a collection of Canadian resources on all aspects of English and French, including quizzes.

Writing tools

The Language Portal’s writing tools have a new look! Easy to consult, they give you access to a wealth of information that will help you write better in English and French.

Glossaries and vocabularies

Access Translation Bureau glossaries and vocabularies.

Date Modified: