TERMIUM Plus®

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micromachining process [1 record]

Record 1 2010-03-29

English

Subject field(s)
  • Electronic Circuits Technology
  • Photoelectricity and Electron Optics
CONT

Based on a micromachining process that can be adopted by current silicon production facilities, these are relatively inexpensive to manufacture and should allow the development of infrared imagers costing one or two orders of magnitude less than current designs, perhaps a few thousand dollars or less.

Key term(s)
  • micro-machining process
  • micro-machining

French

Domaine(s)
  • Technologie des circuits électroniques
  • Photo-électricité et optique électronique
DEF

Ensemble des techniques de microgravure isotropique ou anisotropique du silicium par attaque chimique, photolithographie, gravure par faisceaux d'ions, gravures «plasma».

CONT

La firme a mis au point des réseaux plan-focal bidimensionnels en silice micro-usinée, le micro-usinage est un nouveau procédé de fabrication en usage dans l'industrie microélectronique, sensibles à l'infrarouge.

OBS

micro-usinage : terme publié au Journal officiel de la République française le 27 décembre 2009.

Spanish

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