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SPIN COATER [1 record]

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Record 1 1992-10-28

English

Subject field(s)
  • Printed Circuits and Microelectronics

French

Domaine(s)
  • Circuits imprimés et micro-électronique
DEF

Appareil utilisé pour le dépôt de résines photosensibles, composé d'un support rotatif et d'un système de distribution de résine. La tranche est maintenue sur le support par aspiration pendant la pulvérisation de la résine. On détermine l'épaisseur et l'uniformité du dépôt par l'accélération et la vitesse de rotation.

Spanish

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