TERMIUM Plus®

The Government of Canada’s terminology and linguistic data bank.

SPIN COATING [2 records]

Record 1 2007-11-09

English

Subject field(s)
  • Photoelectricity and Electron Optics
  • Solar Energy
DEF

A process used to coat the wafer with material which is originally in the liquid form ...

OBS

...liquid is dispensed onto the wafer surface in predetermined amount and the wafer is rapidly rotated (up to 6000 rpm; during spinning liquid is uniformly distributed on the surface by centrifugal forces; material is then solidified by low temperature (typically <200°C) bake; in semiconductor processing commonly used to apply photoresist.

CONT

Antireflection coatings are applied primarily by evaporation; the process can be continuous if the vacuum system has suitable pumped entrance and exit ports. Other means of coating include spraying, dipping, and spinning-on liquids that dry and are then heated to densify them.

French

Domaine(s)
  • Photo-électricité et optique électronique
  • Énergie solaire
CONT

[Pile solaire - couche antireflet] La technique par rotation [...] s'apparente aux méthodes d'étalement d'une résine photosensible, le composé se répand uniformément sur la surface par rotation du substrat semi-conducteur.

Spanish

Save record 1

Record 2 2005-02-16

English

Subject field(s)
  • Industrial Techniques and Processes
  • Chemistry
DEF

The process in which a substrate is rotated about an axis perpendicular to its surface while, or immediately after, a coating material is applied in liquid form to the substrate surface.

French

Domaine(s)
  • Techniques industrielles
  • Chimie
DEF

Méthode de formation d'un film mince par dépôt d'une solution de la substance du film sur un plateau qui tourne à vitesse élevée.

Spanish

Save record 2

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