TERMIUM Plus®

The Government of Canada’s terminology and linguistic data bank.

BOW GAGE [1 record]

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Alphabetical list of terms

Record 1 2000-08-18

English

Subject field(s)
  • Printed Circuits and Microelectronics
  • Industrial Techniques and Processes
CONT

Wafer bow is one of the deformities that can cause a wafer to to lose dimensional integrity. This becomes very important with high-resolution photolithography (3 to 4 um line widths or less). A bow gauge is used, either as part of a complete wafer inspection system, or as an individual test piece. A bowed wafer is one whose cross section in one direction is concave or convex.

OBS

The "u" in the expression "um" should be the lower case Geek letter "mu" which is the metric prefix meaning 1/1,000,000 th.

Key term(s)
  • wafer bow gage
  • bow gage

French

Domaine(s)
  • Circuits imprimés et micro-électronique
  • Techniques industrielles

Spanish

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© Public Services and Procurement Canada, 2024
TERMIUM Plus®, the Government of Canada's terminology and linguistic data bank
A product of the Translation Bureau

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