TERMIUM Plus®

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CHEMICAL MECHANICAL POLISHING [1 record]

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Record 1 2006-03-27

English

Subject field(s)
  • Printed Circuits and Microelectronics
DEF

The polishing [of] the top surface of a wafer aided by a slurry containing an abrasive grit suspended in reactive chemical agents.

OBS

Both metals and oxides can be polished with CMP.

Key term(s)
  • chemical-mechanical polishing

French

Domaine(s)
  • Circuits imprimés et micro-électronique
CONT

Pour améliorer le procédé de planarisation par polissage chimico-mécanique utilisé pour la production des semi-conducteurs, une société allemande a développé un support actif piézo-contrôlé pour les plaquettes [...]

Key term(s)
  • polissage chimicomécanique, polissage chimico mécanique

Spanish

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TERMIUM Plus®, the Government of Canada's terminology and linguistic data bank
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