TERMIUM Plus®

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DEPTH-CONCENTRATION PROFILE [1 record]

Record 1 1982-09-02

English

Subject field(s)
  • Analytical Chemistry
CONT

(...) the improved experimental setup allows depth profiles of boron in silicon to be measured with a dynamic range of almost [10 to the 6th power] without any correction.

OBS

In secondary ion mass spectrometry.

French

Domaine(s)
  • Chimie analytique
CONT

En pratique, l'examen d'un échantillon consiste à: (...) tracer séquentiellement au cours d'une même érosion le profil de concentration d'un isotope de chacune des 5 impuretés et ce jusqu'à atteindre un signal stationnaire.

OBS

Cette équivalence se limite au contexte de la microanalyse ionique.

Spanish

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