TERMIUM Plus®

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FLUID FLOW SWITCH [1 record]

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Record 1 2001-09-07

English

Subject field(s)
  • Industrial Techniques and Processes
  • Printed Circuits and Microelectronics
  • Scientific Research Equipment
CONT

Fluid flow switches are used to protect water cooled equipment from possible damage due to cooling flow failure. A sensing element is used to detect fluid flow and activate a relay if the flow falls below a preset level. Flow switches are frequently used on vacuum deposition systems to protect the pump and target, on EPI reactors, furnaces, and similar microelectronic production equipment.

French

Domaine(s)
  • Techniques industrielles
  • Circuits imprimés et micro-électronique
  • Matériel et équipement (Recherche scientifique)

Spanish

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TERMIUM Plus®, the Government of Canada's terminology and linguistic data bank
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