TERMIUM Plus®

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LASER LITHOGRAPHY [1 record]

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Record 1 2024-02-28

English

Subject field(s)
  • Printed Circuits and Microelectronics
  • Lasers and Masers
CONT

Laser lithography is a versatile technique for the creation of microstructures such as microelectromechanical systems (MEMS) and integrated circuits ... The minimum possible feature size that is manufactured in laser lithography is proportional to the wavelength of light.

French

Domaine(s)
  • Circuits imprimés et micro-électronique
  • Masers et lasers
DEF

Procédé utilisant un faisceau laser, en présence de certains gaz, pour dessiner les motifs d'un circuit intégré directement sur la tranche de silicium.

CONT

Depuis des décennies, la lithographie au laser est essentielle à la conception et à la production de puces à grande échelle.

Spanish

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TERMIUM Plus®, the Government of Canada's terminology and linguistic data bank
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