TERMIUM Plus®

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MICROLITHOGRAPHY [1 record]

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Record 1 1999-09-03

English

Subject field(s)
  • Printed Circuits and Microelectronics
  • Lasers and Masers
CONT

The silicon is cut into fingers (or microclaws) by microlithography. (This is also the process by which a chip's components are created; it uses a mixture of light and chemicals to etch away parts of the silicon's surface).

French

Domaine(s)
  • Circuits imprimés et micro-électronique
  • Masers et lasers
DEF

Méthode de projection par contact, employée en électronique intégrée pour reproduire des circuits, à partir de masques, par radiation d'une résine photosensible.

CONT

En effet, il est connu que, lors de la fabrication d'un circuit électronique par microlithographie, le nombre des défauts varie exponentiellement avec la surface.

Spanish

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