TERMIUM Plus®

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PROJECTION STEP-AND-REPEAT MASK ALIGNER [1 record]

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Record 1 2000-08-18

English

Subject field(s)
  • Printed Circuits and Microelectronics
  • Industrial Techniques and Processes
CONT

Wafer steppers (or projection step-and-repeat mask aligners) are one of the three types of mask aligners currently being used for the fabrication of integrated circuits. The other two types are contact/proximity and projection scanners .... Wafer steppers operate in one of two modes. The "first-generation" steppers use fixed steps, with no references to local targets in mid-wafer. Later-design steppers have the capability to re-reference periodically, typically at each field exposure step. The most sophisticated steppers can make adjustments to X, Y, [THETA] (rotation), Z (focus), and two-dimensional tilt to attain the ultimate in overlay accuracy and resolution.

French

Domaine(s)
  • Circuits imprimés et micro-électronique
  • Techniques industrielles

Spanish

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