TERMIUM Plus®

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STACKING FAULT [1 record]

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Alphabetical list of terms

Record 1 1992-10-29

English

Subject field(s)
  • Printed Circuits and Microelectronics
  • Chemistry
DEF

Minor disruption in the single crystal structure of epitaxial layers. They are formed by contaminated or structurally imperfect substrate surfaces. They grow along with the growing epi layer, and on (111) oriented wafers may form one-two-, or three-sided tetrahedral faulted areas which look like one, two, or three-sided equilateral triangles on the wafer surface.

French

Domaine(s)
  • Circuits imprimés et micro-électronique
  • Chimie
DEF

Défaut à deux dimensions caractérisé par une séquence anormale dans l'empilement des plans atomiques d'un cristal.

Spanish

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