TERMIUM Plus®

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VAPOR PHASE DEPOSITION [1 record]

Record 1 2008-11-25

English

Subject field(s)
  • Electrical Engineering
DEF

A process for obtaining thin films on substrates (vacuum deposition) by vaporizing materials to be deposited under vacuum.

OBS

When depositing metals, vacuum evaporation is sometimes called vacuum metallization.

Key term(s)
  • vapour phase deposition

French

Domaine(s)
  • Électrotechnique
DEF

Technique de dépôt de couches minces qui procède par condensation de la vapeur du matériau à déposer sur le substrat à recouvrir.

Spanish

Campo(s) temático(s)
  • Electrotecnia
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