TERMIUM Plus®

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PULVERISATION CATHODIQUE REACTIVE [1 record]

Filter results by subject field Alphabetical list of terms

Filter results by subject field

Alphabetical list of terms

Record 1 2007-07-03

English

Subject field(s)
  • Semiconductors (Electronics)
  • Electronic Systems
DEF

The sputter deposition process in which species sputtered off the target material are chemically reacting with other species in the gas mixture to form a compound to be deposited; e.g. sputtering of Si in plasma containing oxygen will result in deposition of SiO2.

French

Domaine(s)
  • Semi-conducteurs (Électronique)
  • Ensembles électroniques
DEF

Technique de pulvérisation dans laquelle, afin de modifier les propriétés de la couche déposée, on introduit dans l'enceinte du réacteur un gaz réactif, tel que l'azote ou l'oxygène, qui entre en réaction avec le corps soumis à la pulvérisation.

Spanish

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