TERMIUM Plus®

The Government of Canada’s terminology and linguistic data bank.

HOT WALL REACTOR [1 record]

Record 1 2007-07-04

English

Subject field(s)
  • Equipment (Chemistry)
  • Semiconductors (Electronics)
  • Physics of Solids
DEF

A machine (usually a CVD machine) in which the wafers are made hot because the walls of the reactor are hot.

OBS

A cold wall reactor is a reactor in which the wafers are heated by some other means and so the walls of the reactor do not get as hot as the wafers.

French

Domaine(s)
  • Équipement (Chimie)
  • Semi-conducteurs (Électronique)
  • Physique des solides
DEF

Réacteur, normalement de dépôt chimique en phase vapeur, dans lequel les plaquettes de semiconducteurs sont portées à haute température par la chaleur radiante des parois du réacteur.

Spanish

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