TERMIUM Plus®

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VHF-GD [1 record]

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Record 1 2008-08-22

English

Subject field(s)
  • Industrial Techniques and Processes
  • Electronic Circuits Technology
  • Printed Circuits and Microelectronics
CONT

The microstructure of a series of silicon films deposited by very high frequency glow discharge (VHF-GD) with silane concentration in hydrogen varying from 100% down to 1.25% has been observed with transmission electron microscopy (TEM).

French

Domaine(s)
  • Techniques industrielles
  • Technologie des circuits électroniques
  • Circuits imprimés et micro-électronique
CONT

[Cellules au silicium amorphe et ses dérivés] par la technique VHF-GD (Very High Frequency Glow Discharge : décharge de type PECVD, mais à plus haute fréquence, 70 MHz), [...] les dépôts sont plus rapides, ce qui peut donner en laboratoire des cellules microcristallines de quelques microns d'épaisseur.

Spanish

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