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Record number: 1, Textual support number: 1 CONT

Wafer steppers (or projection step-and-repeat mask aligners) are one of the three types of mask aligners currently being used for the fabrication of integrated circuits. The other two types are contact/proximity and projection scanners .... Wafer steppers operate in one of two modes. The "first-generation" steppers use fixed steps, with no references to local targets in mid-wafer. Later-design steppers have the capability to re-reference periodically, typically at each field exposure step. The most sophisticated steppers can make adjustments to X, Y, [THETA] (rotation), Z (focus), and two-dimensional tilt to attain the ultimate in overlay accuracy and resolution.  1, fiche 1, Anglais, - wafer%20stepper

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