TERMIUM Plus®

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ELECTRON BEAM-INDUCED CURRENT ANALYSIS [1 record]

Record 1 2007-11-13

English

Subject field(s)
  • Photoelectricity and Electron Optics
  • Semiconductors (Electronics)
DEF

... a semiconductor analysis technique that employs an electron beam to induce a current within a sample which may be used as a signal for generating images that depict characteristics of the sample, e.g., the locations of p-n junctions in the sample, the presence of local defects, and doping non-homogeneities.

OBS

Since a scanning electron microscope (SEM) is a convenient source of electron beam for this purpose, most EBIC techniques are performed using a SEM.

French

Domaine(s)
  • Photo-électricité et optique électronique
  • Semi-conducteurs (Électronique)
DEF

Technique d'analyse des semiconducteurs qui utilise un faisceau d'électrons pour induire un courant dans un échantillon pouvant servir de signal pour la génération d'images présentant les caractéristiques de l'échantillon, notamment les sites des jonctions p-n de ce dernier ainsi que la présence de défauts locaux et de non-homogénéités de dopage.

OBS

[...] souvent appelée méthode de Morton-Hayes, dans le cas d'une injection d'électrons provoquée par le faisceau d'un microscope électronique à balayage.

Spanish

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