TERMIUM Plus®

The Government of Canada’s terminology and linguistic data bank.

SPIN-ON DEPOSITION [2 records]

Record 1 2007-11-09

English

Subject field(s)
  • Photoelectricity and Electron Optics
  • Solar Energy
DEF

A process used to coat the wafer with material which is originally in the liquid form ...

OBS

...liquid is dispensed onto the wafer surface in predetermined amount and the wafer is rapidly rotated (up to 6000 rpm; during spinning liquid is uniformly distributed on the surface by centrifugal forces; material is then solidified by low temperature (typically <200°C) bake; in semiconductor processing commonly used to apply photoresist.

CONT

Antireflection coatings are applied primarily by evaporation; the process can be continuous if the vacuum system has suitable pumped entrance and exit ports. Other means of coating include spraying, dipping, and spinning-on liquids that dry and are then heated to densify them.

French

Domaine(s)
  • Photo-électricité et optique électronique
  • Énergie solaire
CONT

[Pile solaire - couche antireflet] La technique par rotation [...] s'apparente aux méthodes d'étalement d'une résine photosensible, le composé se répand uniformément sur la surface par rotation du substrat semi-conducteur.

Spanish

Save record 1

Record 2 1986-03-27

English

Subject field(s)
  • Semiconductors (Electronics)
  • Photoelectricity and Electron Optics
OBS

(Acta 143).

French

Domaine(s)
  • Semi-conducteurs (Électronique)
  • Photo-électricité et optique électronique
DEF

(Acta 143) Procédé utilisé entre autre pour le dépôt de couches antireflets permettant d'accroître le rendement de conversion de 35%. Une source liquide contenant un composé organométallique du corps choisi (par exemple le titane) est posée sur une photopile, puis mise sous forme d'une mince pellicule par rotation rapide de la plaque. (Acta electronica, 20,2,1977,p.143).

Spanish

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