TERMIUM Plus^®

Fiche 1,  Justifications,  Anglais

Record number: 1, Textual support number: 1 DEF

The section of the mass spectrometer in which the beam of ions emerging from the ion source is separated into a series of beams, according to the mass-to-charge ratios.  5, fiche 1, Anglais, - mass%20analyser

Record number: 1, Textual support number: 1 CONT

Mass spectrometers, which operate under high vacuum, consist of four basic parts: a handling system ...; an ionization chamber ...; an analyzer, in which the particles in the beam are separated according to mass; and a detector ...  2, fiche 1, Anglais, - mass%20analyser

Record number: 1, Textual support number: 2 CONT

Mass analyzers are systems designed to identify and measure materials according to their molecular weights. The technique has been adapted for many other applications ranging from physics research and the identification of complex molecular structure to assuring the integrity of the fuel systems on the space shuttle and routine helium leak detection. While the uses of mass analyzers in the microelectronics industry include some exotic applications, such as SIMS, the greatest number of systems are used for various types of gas analysis. Applications for mass analyzers include process monitoring, process engineering and control in such areas as evaporation, MBE, sputter etch and deposition, plasma etch and deposition, ion, implantation, LPCVD, CVD, and diffusion furnaces. Another important application is high purity gas certification and electronic gas mixture verification.  2, fiche 1, Anglais, - mass%20analyser

Fiche 1,  Justifications,  Français

Record number: 1, Textual support number: 1 CONT

Un spectromètre de masse comprend quatre éléments essentiels : 1. un système de prélèvement et de transport de l'échantillon vers la source d'ions; 2. une source d'ions [...] 3. un analyseur qui, au moyen de combinaisons variées de champs électriques et magnétiques, sépare les espèces ioniques en faisceaux distincts qu'il filtre, selon le rapport m/e de leur masse à leur charge; 4. un détecteur [...]  3, fiche 1, Français, - analyseur

Fiche 1,  Justifications,  Espagnol

Fiche 2,  Justifications,  Anglais

Record number: 2, Textual support number: 1 CONT

Use of plasma polymerized orgaosilicon films in fabrication of lift-off masks.... Pinhole-free thin films deposited by glow discharge or plasma polymerization of organosilanes, organosilazones and organosiloxanes for use as reactive ion etch oxygen barriers in multilayer resist structures, of lift-off masks, for fabrication of semiconductor devices, such as integrated circuits.... What is claimed is : 1. A method of depositing a layer on a monocrystalline silicon substrate comprising : A. forming on a portion of said substrate a film by plasma polymerizing said film from an ambient containing monomers selected from the group consisting of organosilicons, including organosilanes, organosilazanes, organosiloxanes, and mixtures thereof;...  2, fiche 2, Anglais, - organosilane

Fiche 2,  Justifications,  Français

Record number: 2, Textual support number: 1 CONT

Nous avons étudié l'adsorption d'organosilanes sur des surfaces planes de silice, grâce à une approche par spectroscopie infrarouge que nous avons mise au point pour contourner la difficulté due à la faible surface spécifique des substrats plans.  2, fiche 2, Français, - organosilane

Fiche 2,  Justifications,  Espagnol

Fiche 3,  Justifications,  Anglais

Record number: 3, Textual support number: 1 CONT

Nearly all the polyethylene used for plastic bags, for example, is exposed to a plasma etch that prepares it for printing. Film used in recording is plasma-processed to provide an anti-static surface. Compact discs require plasma processing in their manufacture.  1, fiche 3, Anglais, - plasma%20etch

Fiche 3,  Justifications,  Français

Fiche 3,  Justifications,  Espagnol