TERMIUM Plus^®

Fiche 1,  Justifications,  Anglais

Record number: 1, Textual support number: 1 DEF

The scintillator-photomultiplier detector applied especially in scanning electron microscopy equipment.  2, fiche 1, Anglais, - Everhart%2DThornley%20detector

Record number: 1, Textual support number: 1 CONT

Electron beam lithography requires a flat sample close to the objective lens, making secondary electron imaging difficult with an ordinary Everhart-Thornley detector (a scintillator-photomultiplier in the chamber). A few high end SEMs are equipped with a detector above the objective lens or can be equipped with a microchannel plate on the pole-piece. These types of detectors are a great advantage for lithography since they alloy the operator to decrease the working distance, and thus the spot size, while keeping the sample flat and in focus.  3, fiche 1, Anglais, - Everhart%2DThornley%20detector

Fiche 1,  Justifications,  Français

Fiche 1,  Justifications,  Espagnol