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Record number: 1, Textual support number: 1 DEF

Greek for "arranged upon." The growth of a single crystal semiconductor film upon a single crystal substrate. The n-type layer of silicon deposited on the substrate and buried layer is epitaxial silicon. In IC technology, it is a multilayer structure. Pertaining to a single-crystal layer on a crystalline substrate, and having the same crystalline orientation as the substrate: e.g., silicon atoms condensed from vapor phase onto a silicon-wafer substrate.  1, fiche 1, Anglais, - epitaxial

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