TERMIUM Plus®
The Government of Canada’s terminology and linguistic data bank.
REACTIVE SPUTTERING [2 records]
Record 1 - internal organization data 2017-12-28
Record 1, English
Record 1, Subject field(s)
- Metal-Coating
Record 1, Main entry term, English
- reactive sputtering 1, record 1, English, reactive%20sputtering
Record 1, Abbreviations, English
Record 1, Synonyms, English
Record 1, Textual support, English
Record number: 1, Textual support number: 1 OBS
Sputtering: Also known as cathode sputtering. 1. The ejection of atoms or groups of atoms from the surface of the cathode of a vacuum tube as the result of heavy-iron impact. 2. The use of this process to deposit a thin layer of metal on a glass, plastic, metal, or other surface in vacuum. 2, record 1, English, - reactive%20sputtering
Record 1, French
Record 1, Domaine(s)
- Métallisation
Record 1, Main entry term, French
- pulvérisation réactive
1, record 1, French, pulv%C3%A9risation%20r%C3%A9active
correct, feminine noun
Record 1, Abbreviations, French
Record 1, Synonyms, French
Record 1, Textual support, French
Record number: 1, Textual support number: 1 CONT
Pulvérisation cathodique [...] Matériaux déposés. Tous les matériaux, conducteurs ou isolants, peuvent être déposés soit par pulvérisation directe du matériau massif, soit par pulvérisation réactive. Les deux méthodes sont souvent utilisées simultanément lorsqu'on pulvérise des corps composés (oxyde, nitrures, sulfures, etc.). C'est l'un des principaux avantages de ce procédé de permettre l'obtention de couches stœchiométriques et reproductibles : la pulvérisation du matériau massif assure la reproductibilité de la composition mais elle n'assure pas l'exactitude de la stœchiométrie [...]; la pulvérisation réactive assure la stœchiométrie. 1, record 1, French, - pulv%C3%A9risation%20r%C3%A9active
Record 1, Spanish
Record 1, Textual support, Spanish
Record 2 - internal organization data 2007-07-03
Record 2, English
Record 2, Subject field(s)
- Semiconductors (Electronics)
- Electronic Systems
Record 2, Main entry term, English
- reactive sputtering
1, record 2, English, reactive%20sputtering
correct
Record 2, Abbreviations, English
Record 2, Synonyms, English
- reactive cathode sputtering 2, record 2, English, reactive%20cathode%20sputtering
correct
Record 2, Textual support, English
Record number: 2, Textual support number: 1 DEF
The sputter deposition process in which species sputtered off the target material are chemically reacting with other species in the gas mixture to form a compound to be deposited; e.g. sputtering of Si in plasma containing oxygen will result in deposition of SiO2. 3, record 2, English, - reactive%20sputtering
Record 2, French
Record 2, Domaine(s)
- Semi-conducteurs (Électronique)
- Ensembles électroniques
Record 2, Main entry term, French
- pulvérisation cathodique réactive
1, record 2, French, pulv%C3%A9risation%20cathodique%20r%C3%A9active
correct, feminine noun
Record 2, Abbreviations, French
Record 2, Synonyms, French
- pulvérisation réactive 2, record 2, French, pulv%C3%A9risation%20r%C3%A9active
correct, feminine noun
Record 2, Textual support, French
Record number: 2, Textual support number: 1 DEF
Technique de pulvérisation dans laquelle, afin de modifier les propriétés de la couche déposée, on introduit dans l'enceinte du réacteur un gaz réactif, tel que l'azote ou l'oxygène, qui entre en réaction avec le corps soumis à la pulvérisation. 3, record 2, French, - pulv%C3%A9risation%20cathodique%20r%C3%A9active
Record 2, Spanish
Record 2, Textual support, Spanish
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