TERMIUM Plus®

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CONFOCAL SCAN MODULE [1 record]

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Record 1 1999-03-05

English

Subject field(s)
  • Scientific Research
CONT

The Confocal Scan Module is used to produce confocal images in the eyepiece, with the height of the reflecting specimen being color-coded in colors using a color-converting optical system. This enables even minute defects and contamination on wafers to be detected quickly and reliably.

French

Domaine(s)
  • Recherche scientifique

Spanish

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