TERMIUM Plus®
The Government of Canada’s terminology and linguistic data bank.
DRY ETCHING [3 records]
Record 1 - internal organization data 2004-07-13
Record 1, English
Record 1, Subject field(s)
- Metal Finishing
- Electronic Circuits Technology
Record 1, Main entry term, English
- plasma etching
1, record 1, English, plasma%20etching
correct
Record 1, Abbreviations, English
Record 1, Synonyms, English
- dry plasma etching 2, record 1, English, dry%20plasma%20etching
correct
- dry etching 3, record 1, English, dry%20etching
correct
Record 1, Textual support, English
Record number: 1, Textual support number: 1 CONT
Agents used to remove unwanted material from a substrate are known as etchants. ... By chemical action, the etchant removes all material that is not protected.... In dry plasma etching, the etchant is comprised of gas ions that remove material by virtue of their kinetic energy. ... Ions for plasma etching are often provided by argon.... 1, record 1, English, - plasma%20etching
Record number: 1, Textual support number: 1 OBS
Plasma etching and desmearing gases are used as purifying agents in the fluorocarbon products industry. Contrast to wet etching or solvent etching. 4, record 1, English, - plasma%20etching
Record number: 1, Textual support number: 2 OBS
"etch" (chemical ind.): "décaper". 5, record 1, English, - plasma%20etching
Record 1, French
Record 1, Domaine(s)
- Finissage des métaux
- Technologie des circuits électroniques
Record 1, Main entry term, French
- gravure au plasma
1, record 1, French, gravure%20au%20plasma
correct, feminine noun
Record 1, Abbreviations, French
Record 1, Synonyms, French
- décapage au plasma 2, record 1, French, d%C3%A9capage%20au%20plasma
proposal, masculine noun
Record 1, Textual support, French
Record number: 1, Textual support number: 1 OBS
«décapage» : Opération ayant pour objet de nettoyer une surface [...] 2, record 1, French, - gravure%20au%20plasma
Record number: 1, Textual support number: 2 OBS
La surface des métaux est couverte d'oxydes, de sels, de graisses, de diverses matières [...]. Ces impuretés gênent les traitements ultérieurs soit en formant des incrustations au cours des mises en formes, soit en laissant la surface terne lorsqu'elle doit être brillante et polie. Elles rendent même impossible tout traitement pour lequel la surface doit être correctement mise à nu : soudage, étamage, revêtement électrolytique, métallisation, etc. Le décapage peut s'effectuer soit par des moyens chimiques, soit par des moyens mécaniques. 2, record 1, French, - gravure%20au%20plasma
Record number: 1, Textual support number: 3 OBS
[...] les plasmas sont des «gaz complètement ionisés» [...]. En métallurgie, on utilise le jet de plasma produit par un arc électrique continu de grande énergie pour le soudage, le coupage des métaux ainsi que pour faciliter l'usinage de métaux réfractaires par chauffage local et superficiel de la pièce avant le passage de l'outil de coupe. [...] Les plasmas peuvent aussi servir à l'élaboration de métaux ultrapurs (aciers par le procédé SKF, silicium). 2, record 1, French, - gravure%20au%20plasma
Record 1, Spanish
Record 1, Campo(s) temático(s)
- Acabado de metales
- Tecnología de los circuitos electrónicos
Record 1, Main entry term, Spanish
- grabado de plasma en seco
1, record 1, Spanish, grabado%20de%20plasma%20en%20seco
masculine noun
Record 1, Abbreviations, Spanish
Record 1, Synonyms, Spanish
Record 1, Textual support, Spanish
Record number: 1, Textual support number: 1 DEF
Método para revelar una máscara en una oblea. 1, record 1, Spanish, - grabado%20de%20plasma%20en%20seco
Record number: 1, Textual support number: 1 CONT
El proceso de grabado de plasma en seco reemplaza el método de baño de ácido y película (conocido como procesamiento "húmedo") que se utiliza para crear un diseño en una oblea. El método de plasma en seco lanza iones calientes a través de una máscara directamente en la plaqueta o microcircuito, que evaporan la capa de dióxido de silicón. 1, record 1, Spanish, - grabado%20de%20plasma%20en%20seco
Record 2 - internal organization data 1996-05-21
Record 2, English
Record 2, Subject field(s)
- Printed Circuits and Microelectronics
Record 2, Main entry term, English
- dry etching
1, record 2, English, dry%20etching
correct
Record 2, Abbreviations, English
Record 2, Synonyms, English
Record 2, Textual support, English
Record number: 2, Textual support number: 1 OBS
IC technology. 2, record 2, English, - dry%20etching
Record 2, French
Record 2, Domaine(s)
- Circuits imprimés et micro-électronique
Record 2, Main entry term, French
- gravure à sec
1, record 2, French, gravure%20%C3%A0%20sec
correct, feminine noun
Record 2, Abbreviations, French
Record 2, Synonyms, French
- gravure sèche 2, record 2, French, gravure%20s%C3%A8che
feminine noun
Record 2, Textual support, French
Record number: 2, Textual support number: 1 OBS
des circuits intégrés. 3, record 2, French, - gravure%20%C3%A0%20sec
Record 2, Spanish
Record 2, Textual support, Spanish
Record 3 - internal organization data 1993-03-22
Record 3, English
Record 3, Subject field(s)
- Printed Circuits and Microelectronics
- Industrial Techniques and Processes
Record 3, Main entry term, English
- plasma etching
1, record 3, English, plasma%20etching
correct
Record 3, Abbreviations, English
Record 3, Synonyms, English
- chemical sputtering 2, record 3, English, chemical%20sputtering
correct
- dry etching 1, record 3, English, dry%20etching
correct
Record 3, Textual support, English
Record number: 3, Textual support number: 1 DEF
In IC fabrications, an etching process using a cloud of ionized gas. 2, record 3, English, - plasma%20etching
Record number: 3, Textual support number: 1 CONT
Plasma etching of metal, glass or plastic surfaces (surface engineering). Plasma-etched plastic car-bumpers. 3, record 3, English, - plasma%20etching
Record number: 3, Textual support number: 1 OBS
Contrast to wet or solvent-etching. See hot or cold plasma, and plasma processing. 4, record 3, English, - plasma%20etching
Record 3, French
Record 3, Domaine(s)
- Circuits imprimés et micro-électronique
- Techniques industrielles
Record 3, Main entry term, French
- gravure au plasma
1, record 3, French, gravure%20au%20plasma
correct
Record 3, Abbreviations, French
Record 3, Synonyms, French
Record 3, Textual support, French
Record number: 3, Textual support number: 1 DEF
Dans la fabrication des circuits intégrés, procédé utilisant un gaz ionisé pour obtenir le dessin voulu dans une mince couche métallique déposée sur le substrat. 2, record 3, French, - gravure%20au%20plasma
Record 3, Spanish
Record 3, Textual support, Spanish
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