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PECVD [1 record]
Record 1 - internal organization data 2008-11-25
Record 1, English
Record 1, Subject field(s)
- Electrical Engineering
Record 1, Main entry term, English
- plasma-enhanced chemical vapor deposition
1, record 1, English, plasma%2Denhanced%20chemical%20vapor%20deposition
correct
Record 1, Abbreviations, English
- PECVD 2, record 1, English, PECVD
correct
Record 1, Synonyms, English
Record 1, Textual support, English
Record number: 1, Textual support number: 1 OBS
Chemical vapor deposition (CVD) deposits atoms or molecules by reducing the decomposition of a chemical-vapor precursor species that contains the material to be deposited. The reduction is normally accomplished using hydrogen at an elevated temperature. Decomposition is accomplished by thermal activation. The use of a plasma allows the reduction or decomposition to be done at a lower temperature than using temperature alone. 3, record 1, English, - plasma%2Denhanced%20chemical%20vapor%20deposition
Record 1, Key term(s)
- plasma-enhanced chemical vapour deposition
Record 1, French
Record 1, Domaine(s)
- Électrotechnique
Record 1, Main entry term, French
- dépôt chimique en phase vapeur activé par plasma
1, record 1, French, d%C3%A9p%C3%B4t%20chimique%20en%20phase%20vapeur%20activ%C3%A9%20par%20plasma
correct, masculine noun
Record 1, Abbreviations, French
Record 1, Synonyms, French
Record 1, Textual support, French
Record number: 1, Textual support number: 1 DEF
Technique de dépôt chimique de couches minces en présence d'un gaz partiellement ionisé, appelé plasma. 2, record 1, French, - d%C3%A9p%C3%B4t%20chimique%20en%20phase%20vapeur%20activ%C3%A9%20par%20plasma
Record 1, Spanish
Record 1, Campo(s) temático(s)
- Electrotecnia
Record 1, Main entry term, Spanish
- deposición química en fase vapor asistida por plasma
1, record 1, Spanish, deposici%C3%B3n%20qu%C3%ADmica%20en%20fase%20vapor%20asistida%20por%20plasma
correct, feminine noun
Record 1, Abbreviations, Spanish
Record 1, Synonyms, Spanish
- depósito químico en fase vapor asistido por plasma 2, record 1, Spanish, dep%C3%B3sito%20qu%C3%ADmico%20en%20fase%20vapor%20asistido%20por%20plasma
correct, masculine noun
Record 1, Textual support, Spanish
Record number: 1, Textual support number: 1 CONT
La deposición de películas delgadas de materiales dieléctricos para separar eléctricamente partes de los dispositivos electrónicos a realizar es inevitable en la mayor parte de los casos. Una de las técnicas mejor establecidas para ello es la deposición en fase vapor asistida por plasma [...], que permite obtener dieléctricos con baja porosidad y uniformes en tallas laterales de sustrato grandes, conformes con la topología del sustrato, y con velocidades de depósito altas. 1, record 1, Spanish, - deposici%C3%B3n%20qu%C3%ADmica%20en%20fase%20vapor%20asistida%20por%20plasma
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