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PROCEDE SIMOX [1 record]

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Record 1 1999-03-05

English

Subject field(s)
  • Electronic Circuits Technology

French

Domaine(s)
  • Technologie des circuits électroniques
CONT

[...] le procédé SIMOX mis au point au LETI comporte une phase de recuit à haute température et un matériau SOI [Silicium on Insolator] de qualité supérieure. Sont alors développées en collaboration avec le CEA/DAM des filières de circuits intégrés sur SOI durcis aux effets des rayonnements ionisants.

Spanish

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