TERMIUM Plus®

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THERMAL CHUCK [1 record]

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Record 1 2000-06-28

English

Subject field(s)
  • Printed Circuits and Microelectronics
  • Industrial Techniques and Processes
CONT

Thermal chucks are temperature controlled precision platforms which can be used on the stage of almost any microprober or microscope to test semiconductor wafers, hybrid circuits, and other flat devices, materials, or specimens at controlled temperatures. When equipped with vacuum rings the chuck will hold the test object firmly for efficient thermal transfer.

French

Domaine(s)
  • Circuits imprimés et micro-électronique
  • Techniques industrielles

Spanish

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TERMIUM Plus®, the Government of Canada's terminology and linguistic data bank
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