TERMIUM Plus®

The Government of Canada’s terminology and linguistic data bank.

ACCURACY STEPS [3 records]

Record 1 2000-08-18

English

Subject field(s)
  • Printed Circuits and Microelectronics
  • Industrial Techniques and Processes
CONT

Wafer steppers(or projection step-and-repeat mask aligners) are one of the three types of mask aligners currently being used for the fabrication of integrated circuits. The other two types are contact/proximity and projection scanners.... Wafer steppers operate in one of two modes. The "first-generation" steppers use fixed steps, with no references to local targets in mid-wafer. Later-design steppers have the capability to re-reference periodically, typically at each field exposure step. The most sophisticated steppers can make adjustments to X, Y, [THETA](rotation), Z(focus), and two-dimensional tilt to attain the ultimate in overlay accuracy and resolution.

French

Domaine(s)
  • Circuits imprimés et micro-électronique
  • Techniques industrielles

Spanish

Save record 1

Record 2 1988-07-12

English

Subject field(s)
  • Skating
OBS

Figure skating term(s).

French

Domaine(s)
  • Patinage
OBS

Terme(s) de patinage artistique.

Spanish

Save record 2

Record 3 1981-08-28

English

Subject field(s)
  • Telecommunications
OBS

[The automatic receiver's] high frequency setting accuracy is achieved by means of a particularly fast-switching multiple-loop phase-locked synthesizer(PLL) the frequency of which is quasi-continuously variable in steps of 100 Hz or multiples of 100 Hz.

French

Domaine(s)
  • Télécommunications
OBS

La grande précision de calage des fréquences est obtenue au moyen d'un synthétiseur à verrouillage de phase à boucles multiples assurant une commutation particulièrement rapide, dont la fréquence peut varier de façon quasi continue, par pas de 100 Hz ou par multiples de 100 Hz.

Spanish

Save record 3

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