TERMIUM Plus®
The Government of Canada’s terminology and linguistic data bank.
EPITAXIAL REACTOR [5 records]
Record 1 - internal organization data 2007-07-04
Record 1, English
Record 1, Subject field(s)
- Equipment (Chemistry)
- Semiconductors (Electronics)
- Physics of Solids
Record 1, Main entry term, English
- liquid phase epitaxy reactor
1, record 1, English, liquid%20phase%20epitaxy%20reactor
correct
Record 1, Abbreviations, English
Record 1, Synonyms, English
- liquid phase epitaxial reactor 2, record 1, English, liquid%20phase%20epitaxial%20reactor
correct
- LPE reactor 2, record 1, English, LPE%20reactor
correct
Record 1, French
Record 1, Domaine(s)
- Équipement (Chimie)
- Semi-conducteurs (Électronique)
- Physique des solides
Record 1, Main entry term, French
- réacteur d'épitaxie en phase liquide
1, record 1, French, r%C3%A9acteur%20d%27%C3%A9pitaxie%20en%20phase%20liquide
correct, masculine noun
Record 1, Abbreviations, French
Record 1, Synonyms, French
Record 1, Textual support, French
Record 1, Spanish
Record 1, Textual support, Spanish
Record 2 - internal organization data 2001-09-05
Record 2, English
Record 2, Subject field(s)
- Semiconductors (Electronics)
- Printed Circuits and Microelectronics
- Industrial Techniques and Processes
Record 2, Main entry term, English
- epitaxial reactor
1, record 2, English, epitaxial%20reactor
correct
Record 2, Abbreviations, English
Record 2, Synonyms, English
- epitaxy reactor 2, record 2, English, epitaxy%20reactor
correct
Record 2, Textual support, English
Record number: 2, Textual support number: 1 DEF
A chamber or device used to form an epitaxial film on a substrate. 2, record 2, English, - epitaxial%20reactor
Record number: 2, Textual support number: 1 OBS
There are three types of systems used to produce epitaxia l films: (a) Chemical vapour deposition (CVD)l (b) Liquid, and (c) Molecular beam. 2, record 2, English, - epitaxial%20reactor
Record 2, French
Record 2, Domaine(s)
- Semi-conducteurs (Électronique)
- Circuits imprimés et micro-électronique
- Techniques industrielles
Record 2, Main entry term, French
- réacteur épitaxial
1, record 2, French, r%C3%A9acteur%20%C3%A9pitaxial
correct, masculine noun
Record 2, Abbreviations, French
Record 2, Synonyms, French
- réacteur d'épitaxie 2, record 2, French, r%C3%A9acteur%20d%27%C3%A9pitaxie
correct, masculine noun
Record 2, Textual support, French
Record 2, Spanish
Record 2, Textual support, Spanish
Record 3 - internal organization data 2001-09-05
Record 3, English
Record 3, Subject field(s)
- Printed Circuits and Microelectronics
- Industrial Techniques and Processes
Record 3, Main entry term, English
- epitaxial tube
1, record 3, English, epitaxial%20tube
correct
Record 3, Abbreviations, English
Record 3, Synonyms, English
Record 3, Textual support, English
Record number: 3, Textual support number: 1 DEF
That part of a horizontal epitaxial reactor that covers the susceptor holding wafers about to undergo the epitaxial process. During this process, gas flows across the top of the quartz epitaxial tube, as in an oxidation furnace.(See Epitaxial Reactors). 1, record 3, English, - epitaxial%20tube
Record 3, French
Record 3, Domaine(s)
- Circuits imprimés et micro-électronique
- Techniques industrielles
Record 3, Main entry term, French
- tube épitaxial
1, record 3, French, tube%20%C3%A9pitaxial
proposal, masculine noun
Record 3, Abbreviations, French
Record 3, Synonyms, French
Record 3, Textual support, French
Record 3, Spanish
Record 3, Textual support, Spanish
Record 4 - internal organization data 1993-01-07
Record 4, English
Record 4, Subject field(s)
- Spacecraft
Record 4, Main entry term, English
- liquid phase epitaxial reactor
1, record 4, English, liquid%20phase%20epitaxial%20reactor
correct
Record 4, Abbreviations, English
Record 4, Synonyms, English
Record 4, Textual support, English
Record 4, French
Record 4, Domaine(s)
- Engins spatiaux
Record 4, Main entry term, French
- réacteur épitaxial à phase liquide
1, record 4, French, r%C3%A9acteur%20%C3%A9pitaxial%20%C3%A0%20phase%20liquide
correct, masculine noun, officially approved
Record 4, Abbreviations, French
Record 4, Synonyms, French
Record 4, Textual support, French
Record number: 4, Textual support number: 1 OBS
réacteur épitaxial à phase liquide : terme uniformisé par le Comité d'uniformisation de la terminologie spatiale - CUTS. 2, record 4, French, - r%C3%A9acteur%20%C3%A9pitaxial%20%C3%A0%20phase%20liquide
Record 4, Spanish
Record 4, Textual support, Spanish
Record 5 - internal organization data 1992-08-18
Record 5, English
Record 5, Subject field(s)
- Printed Circuits and Microelectronics
- Industrial Techniques and Processes
Record 5, Main entry term, English
- susceptor
1, record 5, English, susceptor
correct
Record 5, Abbreviations, English
Record 5, Synonyms, English
Record 5, Textual support, English
Record number: 5, Textual support number: 1 CONT
Susceptors are the devices that hold wafers being processed within an epitaxial reactor system. There are three basic types of epitaxial reactors, and susceptor designs vary with each. 2, record 5, English, - susceptor
Record 5, French
Record 5, Domaine(s)
- Circuits imprimés et micro-électronique
- Techniques industrielles
Record 5, Main entry term, French
- suscepteur
1, record 5, French, suscepteur
masculine noun
Record 5, Abbreviations, French
Record 5, Synonyms, French
Record 5, Textual support, French
Record number: 5, Textual support number: 1 DEF
Support de graphite recouvert d'une couche de carbure de silicium et servant à chauffer les tranches dans un réacteur d'épitaxie. 1, record 5, French, - suscepteur
Record 5, Spanish
Record 5, Textual support, Spanish
Copyright notice for the TERMIUM Plus® data bank
© Public Services and Procurement Canada, 2025
TERMIUM Plus®, the Government of Canada's terminology and linguistic data bank
A product of the Translation Bureau
Features
Language Portal of Canada
Access a collection of Canadian resources on all aspects of English and French, including quizzes.
Writing tools
The Language Portal’s writing tools have a new look! Easy to consult, they give you access to a wealth of information that will help you write better in English and French.
Glossaries and vocabularies
Access Translation Bureau glossaries and vocabularies.
- Date Modified: