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IMPLANTATION DEPTH [3 records]

Record 1 2007-07-04

English

Subject field(s)
  • Semiconductors (Electronics)
  • Physics of Solids
CONT

The method of claim... wherein the material of the covering layer is chosen to minimize differences between a coefficient of implantation depth of semiconductor material of the uneven surface layer and a coefficient of implantation depth of the covering layer material.

French

Domaine(s)
  • Semi-conducteurs (Électronique)
  • Physique des solides
CONT

Implantation des ions dans le semiconducteur [...] La profondeur d'arrêt (ou d'implantation), pour une impureté et un semiconducteur donnés, dépend de l'énergie du faisceau [d'ions]. En règle générale, elle est inférieure au micron.

Spanish

Save record 1

Record 2 2001-05-15

English

Subject field(s)
  • Semiconductors (Electronics)
  • Printed Circuits and Microelectronics
OBS

Ion implantation is a precise and reproducible method of doping semiconductors to achieve a desired characteristic. With this equipment, ions of the particular dopant are energized and accelerated to the point where they can be driven in a focused beam directly into the silicon wafer. This technique assures uniform, accurately controlled depth of implantation and ionic diffusion in the wafer, and is highly repeatable on succeeding wafers.

French

Domaine(s)
  • Semi-conducteurs (Électronique)
  • Circuits imprimés et micro-électronique
CONT

équipements de production à commande par programme enregistré par l'implantation ionique ayant des courants du faisceau de 5 m A ou plus.

Spanish

Save record 2

Record 3 2000-09-11

English

Subject field(s)
  • Printed Circuits and Microelectronics
  • Semiconductors (Electronics)
  • Industrial Techniques and Processes
CONT

Traditionally impurities were diffused into a wafer through a masking layer in a diffusion furnace. Today impurities are increasingly being implanted into a wafer structure through a process called ion implantation. A diffusion depth tester is used to determine to what depth these diffused impurities have penetrated into the wafer.

French

Domaine(s)
  • Circuits imprimés et micro-électronique
  • Semi-conducteurs (Électronique)
  • Techniques industrielles

Spanish

Save record 3

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