TERMIUM Plus®

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EPITAXIAL TUBE [1 record]

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Alphabetical list of terms

Record 1 2001-09-05

English

Subject field(s)
  • Printed Circuits and Microelectronics
  • Industrial Techniques and Processes
DEF

That part of a horizontal epitaxial reactor that covers the susceptor holding wafers about to undergo the epitaxial process. During this process, gas flows across the top of the quartz epitaxial tube, as in an oxidation furnace. (See Epitaxial Reactors).

French

Domaine(s)
  • Circuits imprimés et micro-électronique
  • Techniques industrielles

Spanish

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