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EVERHART-THORNLEY DETECTOR [1 record]

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Record 1 2011-06-01

English

Subject field(s)
  • Analytical Chemistry
DEF

The scintillator-photomultiplier detector applied especially in scanning electron microscopy equipment.

CONT

Electron beam lithography requires a flat sample close to the objective lens, making secondary electron imaging difficult with an ordinary Everhart-Thornley detector (a scintillator-photomultiplier in the chamber). A few high end SEMs are equipped with a detector above the objective lens or can be equipped with a microchannel plate on the pole-piece. These types of detectors are a great advantage for lithography since they alloy the operator to decrease the working distance, and thus the spot size, while keeping the sample flat and in focus.

French

Domaine(s)
  • Chimie analytique

Spanish

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