TERMIUM Plus®

The Government of Canada’s terminology and linguistic data bank.

HIGH VACUUM EQUIPMENT [1 record]

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Alphabetical list of terms

Record 1 2015-02-19

English

Subject field(s)
  • Scientific Instruments
  • Physics
OBS

High vacuum is vacuum where the MFP (mean free path) of residual gases is longer than the size of the chamber or of the object under test. High vacuum usually requires multi-stage pumping and ion gauge measurement.

French

Domaine(s)
  • Instruments scientifiques
  • Physique
OBS

Le vide secondaire est le vide obtenu par la pompe dite secondaire dans une installation. Son domaine est classiquement celui des pompes à diffusion et des pompes turbomoléculaires, c’est-à-dire celui du vide poussé (10-1 Pa à 10-5 Pa).

Spanish

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TERMIUM Plus®, the Government of Canada's terminology and linguistic data bank
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