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LPCVD [1 record]

Filter results by subject field Alphabetical list of terms

Filter results by subject field

Alphabetical list of terms

Record 1 2008-08-28

English

Subject field(s)
  • Electrical Engineering
CONT

CVD [chemical vapor deposition] processes have numerous other names, such as ... low-pressure CVD when the pressure is less than ambient ...

Key term(s)
  • low pressure chemical vapour deposition

French

Domaine(s)
  • Électrotechnique
DEF

Technique de dépôt de couches minces sur un substrat, dans laquelle les réactions chimiques ont lieu dans une enceinte à faible pression reliée à une pompe à vide.

Spanish

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