TERMIUM Plus®

The Government of Canada’s terminology and linguistic data bank.

PLASMA CLEANING [1 record]

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Record 1 2016-02-26

English

Subject field(s)
  • Industrial Techniques and Processes
  • Chemical Engineering
CONT

In a cleaning process, inert (Ar, He) [argon, helium] and oxygen plasmas are used. The plasma-cleaning process removes, via ablation, organic contaminates such as oils and other production releases on the surface of most industrial materials.

OBS

Plasma cleaning works primarily by bombarding the material surface with ions that destroy/dislodge surface impurities.

French

Domaine(s)
  • Techniques industrielles
  • Génie chimique
CONT

Le nettoyage et la préparation des surfaces sont primordiales pour le succès de tout procédé de microfabrication. Le laboratoire offre différentes techniques à cet effet, le nettoyage en phase liquide, le nettoyage par l'ozone et le nettoyage par plasma.

Spanish

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TERMIUM Plus®, the Government of Canada's terminology and linguistic data bank
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