TERMIUM Plus®

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SILICON-ON-INSULATOR PROCESS [1 record]

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Record 1 1992-11-02

English

Subject field(s)
  • Semiconductors (Electronics)

French

Domaine(s)
  • Semi-conducteurs (Électronique)
DEF

Variante du procédé CMOS dans laquelle on dépose, sur un substrat isolant tel le saphir (une variété bleue de corindon) ou le spinelle (un aluminate naturel du magnésium), une mince couche épitaxiale de silicum monocristallin dans laquelle seront réalisés les composants du circuit intégré. Le procédé silicium sur isolant permet d'améliorer les performances des circuits grâce à la réduction des capacités parasites.

Spanish

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