TERMIUM Plus®

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ULTRA-HIGH VACUUM CHAMBER [1 record]

Filter results by subject field Alphabetical list of terms

Filter results by subject field

Alphabetical list of terms

Record 1 2007-07-03

English

Subject field(s)
  • Vacuum Machines
  • Semiconductors (Electronics)
DEF

Enclosure in which extremely low pressure can be produced by vacuum pumps.

French

Domaine(s)
  • Machines à vide
  • Semi-conducteurs (Électronique)
DEF

Enceinte où règne une très basse pression.

CONT

L'enceinte du réacteur d'épitaxie est sous ultra-vide, afin d'éviter la contamination des couches pendant la croissance.

Spanish

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