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X-RAY NANOLITHOGRAPHY [1 record]
Record 1 - internal organization data 2014-02-07
Record 1, English
Record 1, Subject field(s)
- Optics
- Lithography, Offset Printing and Collotype
Record 1, Main entry term, English
- X-ray nanolithography
1, record 1, English, X%2Dray%20nanolithography
correct
Record 1, Abbreviations, English
Record 1, Synonyms, English
Record 1, Textual support, English
Record number: 1, Textual support number: 1 OBS
For several years we have been developing the tools and methods of x-ray nanolithography (i.e., sub-100 nm features). We have explored the theoretical and practical limitations, and endeavored to make its various components (for example, mask making, resists, electroplating, sources, alignment, etc.) reliable and "user friendly." 2, record 1, English, - X%2Dray%20nanolithography
Record 1, French
Record 1, Domaine(s)
- Optique
- Lithographie, offset et phototypie
Record 1, Main entry term, French
- nanolithographie par rayons X
1, record 1, French, nanolithographie%20par%20rayons%20X
correct, feminine noun
Record 1, Abbreviations, French
Record 1, Synonyms, French
Record 1, Textual support, French
Record number: 1, Textual support number: 1 OBS
Il y a dans toute lithographie, depuis le Batik de Bali à la nanolithographie par rayons X, trois étapes: le dépôt de la couche sensible, le transfert du motif, et la fixation (révélation) de ce motif. 1, record 1, French, - nanolithographie%20par%20rayons%20X
Record 1, Spanish
Record 1, Campo(s) temático(s)
- Óptica
- Litografía, offset y fototipia
Record 1, Main entry term, Spanish
- nanolitografía de rayos X
1, record 1, Spanish, nanolitograf%C3%ADa%20de%20rayos%20X
correct, feminine noun
Record 1, Abbreviations, Spanish
Record 1, Synonyms, Spanish
Record 1, Textual support, Spanish
Record number: 1, Textual support number: 1 CONT
La utilización de rayos X para nanolitografía se ha restringido por el momento a aplicaciones de investigación, ya que la industria microelectrónica se ha basado en los últimos años en la utilización de técnicas ópticas especiales que han permitido obtener estructuras mucho menores que la longitud de onda utilizada. Para la industria de semiconductores, la utilización de un sincrotrón externo en lugar de un equipo "in situ" en la fábrica es un grave inconveniente. Uno de los sincrotrones que ha mantenido un programa importante de investigación en nanolitografía de rayos X es Aladdin, en la Universidad de Winsconsin. 1, record 1, Spanish, - nanolitograf%C3%ADa%20de%20rayos%20X
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