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COLD WALL REACTOR [1 record]

Filter results by subject field Alphabetical list of terms

Filter results by subject field

Alphabetical list of terms

Record 1 2007-07-04

English

Subject field(s)
  • Equipment (Chemistry)
  • Semiconductors (Electronics)
  • Physics of Solids
DEF

A machine (usually a CVD [chemical vapour deposition] machine) in which the wafers are heated directly rather than through the walls like in a furnace.

OBS

This can be done by shining a light on the wafers, exposing them to electromagnetic energy, or mounting them on heated plates. The walls of the reactor are then at a lower temperature than the wafers.

French

Domaine(s)
  • Équipement (Chimie)
  • Semi-conducteurs (Électronique)
  • Physique des solides
DEF

Réacteur, normalement de dépôt chimique en phase vapeur, dans lequel les plaquettes de semiconducteurs sont chauffées directement plutôt que par des parois, comme celles d'un four.

Spanish

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