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DRIE [1 record]
Record 1 - internal organization data 2025-12-05
Record 1, English
Record 1, Subject field(s)
- Electronic Circuits Technology
- Printed Circuits and Microelectronics
- IT Security
Record 1, Main entry term, English
- deep reactive ion etching
1, record 1, English, deep%20reactive%20ion%20etching
correct, noun
Record 1, Abbreviations, English
- DRIE 1, record 1, English, DRIE
correct, noun
Record 1, Synonyms, English
- deep reactive-ion etching 2, record 1, English, deep%20reactive%2Dion%20etching
correct, noun
- DRIE 2, record 1, English, DRIE
correct, noun
- DRIE 2, record 1, English, DRIE
Record 1, Textual support, English
Record number: 1, Textual support number: 1 CONT
Deep reactive-ion etching (DRIE) is a highly anisotropic etch process used to create deep penetration, steep-sided holes and trenches in wafers/substrates, typically with high aspect ratios. 2, record 1, English, - deep%20reactive%20ion%20etching
Record 1, French
Record 1, Domaine(s)
- Technologie des circuits électroniques
- Circuits imprimés et micro-électronique
- Sécurité des TI
Record 1, Main entry term, French
- gravure ionique réactive profonde
1, record 1, French, gravure%20ionique%20r%C3%A9active%20profonde
correct, feminine noun
Record 1, Abbreviations, French
- DRIE 1, record 1, French, DRIE
correct, feminine noun
Record 1, Synonyms, French
Record 1, Textual support, French
Record number: 1, Textual support number: 1 CONT
Gravure ionique réactive profonde (DRIE). Dans les cas où la profondeur de gravure est très grande, la RIE [gravure ionique réactive] n'est plus une option valable de gravure à cause de la faible sélectivité avec le masque. Les procédés de DRIE offrent des sélectivités plus importantes et permettent donc d'atteindre des profondeurs de gravure de 500 µm [micromètres] ou plus [...] 1, record 1, French, - gravure%20ionique%20r%C3%A9active%20profonde
Record 1, Spanish
Record 1, Campo(s) temático(s)
- Tecnología de los circuitos electrónicos
- Circuitos impresos y microelectrónica
- Seguridad de IT
Record 1, Main entry term, Spanish
- grabado iónico reactivo profundo
1, record 1, Spanish, grabado%20i%C3%B3nico%20reactivo%20profundo
correct, masculine noun
Record 1, Abbreviations, Spanish
- DRIE 1, record 1, Spanish, DRIE
correct, masculine noun
Record 1, Synonyms, Spanish
Record 1, Textual support, Spanish
Record number: 1, Textual support number: 1 CONT
La masa [...] inercial se crea mediante grabado de la capa de silicio tanto superior como inferior de la oblea de SOI(silicio sobre aislante) mediante RIE(grabado iónico reactivo) y DRIE(grabado iónico reactivo profundo), respectivamente. 2, record 1, Spanish, - grabado%20i%C3%B3nico%20reactivo%20profundo
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