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ELLIPSOMETRIE MODULATION PHASE [1 record]
Record 1 - internal organization data 2004-02-04
Record 1, English
Record 1, Subject field(s)
- Optics
Record 1, Main entry term, English
- phase modulation ellipsometry 1, record 1, English, phase%20modulation%20ellipsometry
Record 1, Abbreviations, English
Record 1, Synonyms, English
Record 1, Textual support, English
Record number: 1, Textual support number: 1 CONT
The most successful [approach] was the so-called photometric ellipsometry in which the polarization of light is modulated by means of a linear polarizer, namely rotating polarizer (RPE) or rotating analyzer (RAE) ellipsometry. Later, the introduction of additional optical elements in the ellipsometer, able to induce a phase shift in the polarization state of light, led to rotating compensator ellipsometry (RCE), and phase modulation ellipsometry (PME). 1, record 1, English, - phase%20modulation%20ellipsometry
Record number: 1, Textual support number: 1 OBS
ellipsometry: a branch of optics concerned with the analysis, measurement, and application of elliptically polarized light. 2, record 1, English, - phase%20modulation%20ellipsometry
Record 1, French
Record 1, Domaine(s)
- Optique
Record 1, Main entry term, French
- ellipsométrie à modulation de phase
1, record 1, French, ellipsom%C3%A9trie%20%C3%A0%20modulation%20de%20phase
feminine noun
Record 1, Abbreviations, French
Record 1, Synonyms, French
Record 1, Textual support, French
Record number: 1, Textual support number: 1 CONT
[...] ellipsométrie à modulation de phase [...] technique [qui] consiste à analyser la réflexion normale sur l'échantillon(à condition qu'il soit de symétrie cubique) d’une lumière polarisée dont la phase est modulée dans le temps. Les modifications de polarisation permettent de déduire en temps réel l'anisotropie optique de la surface ou d’une interface, alors que l'ellipsométrie oblique est une technique de volume. Les couches «désadaptées»(de paramètres de maille différents) et les hétérojonctions de semi-conducteurs III-V ont largement été étudiées par cette méthode. 1, record 1, French, - ellipsom%C3%A9trie%20%C3%A0%20modulation%20de%20phase
Record 1, Spanish
Record 1, Textual support, Spanish
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