TERMIUM Plus®

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ATTAQUE FAISCEAU ION [1 record]

Record 1 2010-02-05

English

Subject field(s)
  • Lasers and Masers
  • Atomic Physics
  • Printed Circuits and Microelectronics

French

Domaine(s)
  • Masers et lasers
  • Physique atomique
  • Circuits imprimés et micro-électronique
DEF

Ajustage de l'épaisseur des couches métalliques d'un circuit, qui consiste à projeter sur le matériau à traiter un faisceau d'ions extraits d'un plasma qui arrache la matière à l'endroit désiré.

Spanish

Save record 1

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