TERMIUM Plus®

The Government of Canada’s terminology and linguistic data bank.

FOUR HORIZONTAL [2 records]

Record 1 2007-07-04

English

Subject field(s)
  • Ovens, Furnaces and Boilers (Heating)
  • Semiconductors (Electronics)
DEF

A furnace for high temperature processing of semiconductor wafers in which process tube is located horizontally, i.e. parallel to the ground ...

OBS

[It is] used in semiconductor processing for oxidation, CVD [chemical vapour deposition], diffusion and anneals; batch process; inferior to vertical furnace in terms of the foot print, wafer loading automation, and heating uniformity.

French

Domaine(s)
  • Fours et chaudières (Chauffage)
  • Semi-conducteurs (Électronique)

Spanish

Save record 1

Record 2 1988-04-22

English

Subject field(s)
  • Food Industries
  • Breadmaking
OBS

used in the baking industry.

French

Domaine(s)
  • Industrie de l'alimentation
  • Boulangerie

Spanish

Save record 2

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