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GRAVURE FAISCEAU IONS REACTIFS [1 record]
Record 1 - internal organization data 2026-03-06
Record 1, English
Record 1, Subject field(s)
- Electronic Circuits Technology
- Printed Circuits and Microelectronics
- Photoelectricity and Electron Optics
- IT Security
Record 1, Main entry term, English
- reactive ion beam etching
1, record 1, English, reactive%20ion%20beam%20etching
correct, noun
Record 1, Abbreviations, English
- RIBE 1, record 1, English, RIBE
correct, noun
Record 1, Synonyms, English
Record 1, Textual support, English
Record number: 1, Textual support number: 1 CONT
RIBE involves the use of an ion beam in the presence of reactive gases. Unlike RIE [reactive ion etching], where plasma is generated within the reaction chamber, RIBE directs a focused ion beam onto the substrate, allowing for highly directional etching. 2, record 1, English, - reactive%20ion%20beam%20etching
Record 1, French
Record 1, Domaine(s)
- Technologie des circuits électroniques
- Circuits imprimés et micro-électronique
- Photo-électricité et optique électronique
- Sécurité des TI
Record 1, Main entry term, French
- gravure par faisceau d'ions réactifs
1, record 1, French, gravure%20par%20faisceau%20d%27ions%20r%C3%A9actifs
correct, feminine noun
Record 1, Abbreviations, French
- RIBE 1, record 1, French, RIBE
correct, feminine noun
Record 1, Synonyms, French
Record 1, Textual support, French
Record number: 1, Textual support number: 1 CONT
La gravure par faisceau d'ions assistés chimiquement (CAIBE) et la gravure par faisceau d'ions réactifs (RIBE) ont également été utilisées pour graver des matériaux. [...] En CAIBE, les gaz réactifs sont ajoutés dans le plasma sous la grille d'accélération : la composante chimique de la gravure est privilégiée. En RIBE, les gaz réactifs sont introduits dans la source. 1, record 1, French, - gravure%20par%20faisceau%20d%27ions%20r%C3%A9actifs
Record 1, Spanish
Record 1, Campo(s) temático(s)
- Tecnología de los circuitos electrónicos
- Circuitos impresos y microelectrónica
- Fotoelectricidad y óptica electrónica
- Seguridad de IT
Record 1, Main entry term, Spanish
- grabado por haz de iones reactivos
1, record 1, Spanish, grabado%20por%20haz%20de%20iones%20reactivos
correct, masculine noun
Record 1, Abbreviations, Spanish
- RIBE 1, record 1, Spanish, RIBE
correct, masculine noun
Record 1, Synonyms, Spanish
Record 1, Textual support, Spanish
Record number: 1, Textual support number: 1 CONT
Grabado por haz de iones reactivos (RIBE): en esta técnica los iones de un plasma son acelerados proporcionando un haz de iones que incide perpendicularmente sobre la muestra arrancando el material superficial de manera muy direccional. La muestra está separada del plasma por una rejilla que sirve para extraer un haz dirigido de iones hacia la muestra. 1, record 1, Spanish, - grabado%20por%20haz%20de%20iones%20reactivos
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