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GRAVURE IONIQUE REACTIVE [1 record]
Record 1 - internal organization data 2025-12-05
Record 1, English
Record 1, Subject field(s)
- Electronic Circuits Technology
- Printed Circuits and Microelectronics
- IT Security
Record 1, Main entry term, English
- reactive ion etching
1, record 1, English, reactive%20ion%20etching
correct, noun
Record 1, Abbreviations, English
- RIE 2, record 1, English, RIE
correct, noun
Record 1, Synonyms, English
Record 1, Textual support, English
Record number: 1, Textual support number: 1 CONT
Reactive ion etching (RIE) is a plasma etching process that adds a charge to the part being etched which induces a directional component to the etching process. This directionality of the etch enables significantly smaller etch feature sizes which is commonly used on substrates in the semiconductor industry. 3, record 1, English, - reactive%20ion%20etching
Record 1, French
Record 1, Domaine(s)
- Technologie des circuits électroniques
- Circuits imprimés et micro-électronique
- Sécurité des TI
Record 1, Main entry term, French
- gravure ionique réactive
1, record 1, French, gravure%20ionique%20r%C3%A9active
correct, feminine noun
Record 1, Abbreviations, French
- RIE 1, record 1, French, RIE
correct, feminine noun
Record 1, Synonyms, French
Record 1, Textual support, French
Record number: 1, Textual support number: 1 CONT
La RIE est une variante physico-chimique de gravure au plasma pour laquelle une différence de potentiel entre un gaz et le matériau à graver est générée pour faire intervenir efficacement des ions dans la gravure. 2, record 1, French, - gravure%20ionique%20r%C3%A9active
Record 1, Spanish
Record 1, Campo(s) temático(s)
- Tecnología de los circuitos electrónicos
- Circuitos impresos y microelectrónica
- Seguridad de IT
Record 1, Main entry term, Spanish
- grabado iónico reactivo
1, record 1, Spanish, grabado%20i%C3%B3nico%20reactivo
correct, masculine noun
Record 1, Abbreviations, Spanish
- RIE 1, record 1, Spanish, RIE
correct, masculine noun
Record 1, Synonyms, Spanish
- grabado por iones reactivos 2, record 1, Spanish, grabado%20por%20iones%20reactivos
correct, masculine noun
- RIE 2, record 1, Spanish, RIE
correct, masculine noun
- RIE 2, record 1, Spanish, RIE
Record 1, Textual support, Spanish
Record number: 1, Textual support number: 1 CONT
El grabado iónico reactivo [...] es una de las técnicas más usadas para grabado seco. El RIE es realizado por la combinación de mecanismos químicos generados en el plasma con los efectos físicos causados por el bombardeo iónico. 3, record 1, Spanish, - grabado%20i%C3%B3nico%20reactivo
Record number: 1, Textual support number: 2 CONT
Grabado por iones reactivos (RIE): En esta técnica el grabado se produce por bombardeo iónico de los iones contenidos en un plasma. El plasma reacciona física y químicamente con la superficie del material retirando una parte del material o sustancias depositadas en él. El plasma es generado a baja presión por uno o más campos eléctricos o magnéticos. A diferencia del grabado RIBE, el plasma está en contacto directo con la muestra lo que la hace una técnica algo menos direccional que el RIBE. 2, record 1, Spanish, - grabado%20i%C3%B3nico%20reactivo
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