TERMIUM Plus^®

Record 1,  Textual support,  English

Record number: 1, Textual support number: 1 DEF

A machine (usually a CVD [chemical vapour deposition] machine) in which the wafers are heated directly rather than through the walls like in a furnace.  1, record 1, English, - cold%20wall%20reactor

Record number: 1, Textual support number: 1 OBS

This can be done by shining a light on the wafers, exposing them to electromagnetic energy, or mounting them on heated plates. The walls of the reactor are then at a lower temperature than the wafers.  1, record 1, English, - cold%20wall%20reactor

Record 1,  Textual support,  French

Record number: 1, Textual support number: 1 DEF

Réacteur, normalement de dépôt chimique en phase vapeur, dans lequel les plaquettes de semiconducteurs sont chauffées directement plutôt que par des parois, comme celles d'un four.  2, record 1, French, - r%C3%A9acteur%20%C3%A0%20paroi%20froide

Record 1,  Textual support,  Spanish