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ELECTRONIC LITHOGRAPHY [1 record]
Record 1 - internal organization data 2011-08-12
Record 1, English
Record 1, Subject field(s)
- Lithography, Offset Printing and Collotype
Record 1, Main entry term, English
- electron-beam lithography
1, record 1, English, electron%2Dbeam%20lithography
correct
Record 1, Abbreviations, English
Record 1, Synonyms, English
- e-beam lithography 3, record 1, English, e%2Dbeam%20lithography
- electronic lithography 3, record 1, English, electronic%20lithography
Record 1, Textual support, English
Record number: 1, Textual support number: 1 DEF
Lithography in which the radiation-sensitive film or resist is placed in the vacuum chamber of a scanning beam electron microscope and exposed by an electron beam under digital computer control. After exposure, the film undergoes conventional development and other production processes. 4, record 1, English, - electron%2Dbeam%20lithography
Record 1, French
Record 1, Domaine(s)
- Lithographie, offset et phototypie
Record 1, Main entry term, French
- lithographie par faisceau électronique
1, record 1, French, lithographie%20par%20faisceau%20%C3%A9lectronique
correct, feminine noun
Record 1, Abbreviations, French
Record 1, Synonyms, French
- lithographie par faisceau d'électrons 2, record 1, French, lithographie%20par%20faisceau%20d%27%C3%A9lectrons
correct, feminine noun
- électromasquage 3, record 1, French, %C3%A9lectromasquage
masculine noun
- masquage électronique 3, record 1, French, masquage%20%C3%A9lectronique
masculine noun
- masquage par faisceau d'électrons 4, record 1, French, masquage%20par%20faisceau%20d%27%C3%A9lectrons
masculine noun
Record 1, Textual support, French
Record number: 1, Textual support number: 1 DEF
Ensemble de procédés utilisant un faisceau d'électrons qui agit sur des résines électrosensibles pour dessiner les motifs d'un circuit sur des masques ou par écriture directe. 3, record 1, French, - lithographie%20par%20faisceau%20%C3%A9lectronique
Record 1, Spanish
Record 1, Campo(s) temático(s)
- Litografía, offset y fototipia
Record 1, Main entry term, Spanish
- litografía por haz de electrones
1, record 1, Spanish, litograf%C3%ADa%20por%20haz%20de%20electrones
correct, feminine noun
Record 1, Abbreviations, Spanish
- EBL 1, record 1, Spanish, EBL
correct, feminine noun
Record 1, Synonyms, Spanish
- electrolitografía 2, record 1, Spanish, electrolitograf%C3%ADa
correct, feminine noun
Record 1, Textual support, Spanish
Record number: 1, Textual support number: 1 DEF
[…] técnica especializada para crear plantillas extremadamente finas, fundamentales para la fabricación de los modernos circuitos electrónicos. 2, record 1, Spanish, - litograf%C3%ADa%20por%20haz%20de%20electrones
Record number: 1, Textual support number: 1 CONT
La técnica consiste en cubrir la oblea sobre la que se quiere trabajar con una película sensible a los electrones. Mediante una fuente de electrones se "dibuja" sobre la película la plantilla que se pretende crear. La zona bombardeada con electrones sufre ciertos cambios estructurales. Posteriormente se somete el conjunto a la acción de una solución líquida que o bien disolverá la película protectora sólo en la zona expuesta a los electrones (litografía positiva) o bien la no expuesta (litografía negativa), dejando al descubierto la oblea sólo en las zonas que nos interesan para su posterior procesado. 2, record 1, Spanish, - litograf%C3%ADa%20por%20haz%20de%20electrones
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