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PLANARISATION POLISSAGE CHIMICO-MECANIQUE [1 record]
Record 1 - internal organization data 2010-12-20
Record 1, English
Record 1, Subject field(s)
- Printed Circuits and Microelectronics
Record 1, Main entry term, English
- chemical mechanical planarization
1, record 1, English, chemical%20mechanical%20planarization
correct
Record 1, Abbreviations, English
- CMP 1, record 1, English, CMP
correct
Record 1, Synonyms, English
Record 1, Textual support, English
Record number: 1, Textual support number: 1 CONT
Polishing and planarization are related in that polishing improves the flatness (planarity), smoothness and optical properties of a surface. Planarization, however, is a much more critical process. Integrated circuit (IC) manufacturers must planarize each surface layer of an in-process wafer to make it level for the next application of microlithography. Chemical mechanical planarization (CMP) is used during the semiconductor manufacturing process to planarize individual layers in complex integrated circuits to customer-specific parameters. 2, record 1, English, - chemical%20mechanical%20planarization
Record 1, Key term(s)
- chemical-mechanical planarization
- chemical mechanical planarisation
- chemical-mechanical planarisation
Record 1, French
Record 1, Domaine(s)
- Circuits imprimés et micro-électronique
Record 1, Main entry term, French
- planarisation chimico-mécanique
1, record 1, French, planarisation%20chimico%2Dm%C3%A9canique
correct, feminine noun
Record 1, Abbreviations, French
- CMP 2, record 1, French, CMP
feminine noun
Record 1, Synonyms, French
- planarisation par polissage chimico-mécanique 3, record 1, French, planarisation%20par%20polissage%20chimico%2Dm%C3%A9canique
correct, feminine noun
- aplanissement chimico-mécanique 4, record 1, French, aplanissement%20chimico%2Dm%C3%A9canique
proposal, masculine noun
Record 1, Textual support, French
Record number: 1, Textual support number: 1 CONT
La société [Novellus Systems Inc.] est spécialisée dans les équipements avancés pour la déposition, le traitement de surface et la planarisation chimico-mécanique conçus pour les besoins de la fabrication de masse de semi-conducteurs au moindre coût. 5, record 1, French, - planarisation%20chimico%2Dm%C3%A9canique
Record 1, Key term(s)
- planarisation chimicomécanique
- planarisation chimico mécanique
- aplanissement chimicomécanique
- aplanissement chimico mécanique
Record 1, Spanish
Record 1, Textual support, Spanish
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